摘要 本文采用電子輔助增強(qiáng)熱絲化學(xué)氣相沉積(HFCVD)系統(tǒng)，CH4／H2、CH4／H2／Ar氣體和不同比例的四種氣氛制備了納米金剛石薄膜，利用Raman光譜和原子力顯微鏡(AFM)表征了薄膜的結(jié)構(gòu)和顯微形貌，采用納米壓入測(cè)試技術(shù)測(cè)量了納米金剛石薄膜的顯微力學(xué)特性，獲得了加載、卸載曲線，以及硬度和模量隨壓入深度的變化曲線。結(jié)果表明：薄膜具有明顯的納米結(jié)構(gòu)特點(diǎn)，隨著CH4、Ar濃度的增加，晶粒更加細(xì)化，表面粗糙度更低。無(wú)Ar氣氛制備的納米金剛石薄膜的彈性恢復(fù)較好，硬度和模量較高，CH4和Ar含量越低的制備氣氛，其硬度和模量相對(duì)較高。（金剛石與磨料磨具工程2009年第一期）
　　
　　Abstract In this paper，nanocrystalline diamond films were prepared by using CH4／H2，CH4／H2／Ar with different concentration in electron enhanced hot filament chemical vapor deposition(HFCVD)system．Scanning electron microscopy(SEM)and atom force microscopy(AFM)as well as Raman scattering spectra were employed to characterize the as—grown films．The micro—mechanical properties were measured by nano—indentation method．The uploading and downloading curves and the variety of hardness and Young’s modulus with indentation depth were gained．The results showed that diamond film had a special nano—scaled structure．The higher the CH4 and Ar gas concentration，the finer the grain size and the lower the surface roughness．
　　The nanocrystalline diamond films deposited without Ar gas have a favorable elasticity restoring capacity and a higher average hardness and Young，s modulus．With lower CH4 and Ar gas concentration，the average hardness and Young，s modulus of the films got higher．