張浩晨, 徐鍇, 燕增宇, 宋志朋, 陳廣超

中國科學院大學材料科學與光電技術學院

       Zhang H C, Xu K, Yan Z Y, et al. Dynamic friction polishing of single crystal diamond. Journal of University of Chinese Academy of Sciences, 2024, 41(5): 604-611.

       DOI: 10.7523/j.ucas.2023.003

       摘要：在眾多單晶金剛石拋光方法中，動態摩擦拋光(DFP)因其具有極高的去除速率而受到廣泛關注。研究DFP過程中3種拋光參數(拋光載荷、拋光時間和拋光盤線速率)以及3種夾持方式(粘接式、鑲嵌式和卡鉗式)對單晶金剛石拋光效果的影響。結果表明：增大拋光載荷、拋光時間和拋光盤線速率，都會導致樣品的質量損耗增加和表面粗糙度降低，并提升金剛石(400)面的衍射峰強度。在3種夾持方法中，粘接式夾持的去除速率最快，最高可達25.2 nm/h，鑲嵌式夾持最慢，卡鉗式夾持介于前二者之間。定義一個拋光評價參量K：K=ΔRa/Δm，即單位材料損耗量下獲得的表面粗糙度改善。根據K值的變化，可將DFP過程劃分為以“粗糙度改善”為主和以“質量損耗”為主的2個階段，前者K值高于后者。拋光參數中，增加拋光盤線速率可以單調提高K值，而拋光載荷和拋光時間對K值存在復雜影響。

       Abstract：The dynamic friction polishing (DFP) method has received extensive attention due to its significantly high removal rate comparing with other single crystal diamond polishing methods. In this study, three parameters (polishing load, polishing time, and polishing plate linear velocity) and three clamping types (bonded, inlay, and caliper type) were studied on the influence on the samples' surface roughness (Ra) improvement and the mass loss. The results showed that the increase of the mass loss and the reduction of roughness occurred with increasing the polishing load, the polishing time, and the polishing plate linear velocity, respectively. Whilst, the X-ray diffraction intensity of (400) crystalline surface of each polished sample was enhanced. Among the three clamping types, the bonded clamping type possessed the fastest removal rates, up to 25.2 nm/h. A polishing evaluation parameter, K, was defined as K=ΔRa/Δm, i.e., representing the improvement in surface roughness obtained per unit mass loss. According to variation of the parameter K, the DFP procedure could be divided into two stages, "the roughness improvement domination stage" and "the mass loss domination stage", with the former having higher K values than the latter. K values increased monotonically with the increase of the polishing plate linear velocity, whilst they were influenced complicatedly by the polishing load and the polishing time.

       關鍵詞：單晶金剛石, 動態摩擦拋光, 粗糙度, 質量損耗, 夾持方式

       Keywords: single crystal diamond, dynamic friction polishing (DFP), roughness, mass loss, clamping type